Design and performance analysis of a vertically stacked gate-all-around nanosheet FET with embedded nanocavity for biosensing applications

design-and-performance-analysis-of-a-vertically-stacked-gate-all-around-nanosheet-fet-with-embedded-nanocavity-for-biosensing-applications
Design and performance analysis of a vertically stacked gate-all-around nanosheet FET with embedded nanocavity for biosensing applications
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